Mini UHV Gate Valve SERIES 01.0
Multi-purpose valves from UHV to advanced applications.
- No lubricant required - Low particle generation - Shock reduction - Vulcanized seal
- Company:VAT
- Price:Other
1~6 item / All 6 items
Multi-purpose valves from UHV to advanced applications.
- No lubricant required - Low particle generation - Shock reduction - Vulcanized seal
We offer port diameter types in ANSI, ISO, and JIS formats. We also accommodate special port diameters.
The "VRC manufactured bonnet style vacuum gate valve" is compatible with almost all types of diameters. It also supports combinations of different port diameters, including combinations of different size diameters (e.g., one side 4 inches, the other side 6 inches). We can also manufacture "flangeless valves" with minimized flange face dimensions. You can choose from stainless steel or 6061 aluminum as materials. No special tools or skills are required to remove the drive unit, making it easy for anyone to detach the drive unit (removal time: approximately 5 minutes). VRC is Vacuum Research Corporation, a manufacturer of vacuum equipment based in Pittsburgh, Pennsylvania, USA. For more details, please download the catalog or contact us.
Can be set to any temperature up to 180℃! Maintenance periods can be significantly extended.
The "UXG/LG Series" is a rectangular gate valve developed for partitioning between the reaction chamber and transfer chamber of semiconductor vacuum equipment. The body is made of aluminum and is operated by a double-acting air actuator. The heater-equipped version features not only external heating from a built-in external heater in the fixed body but also has a heater inside the movable valve body, allowing for heating from both the outside and inside, which provides excellent uniform heating performance. 【Features】 ■ Significantly extends maintenance intervals ■ Allows individual temperature settings for internal and external areas ■ Non-sliding structure that minimizes particle generation during valve opening and closing operations ■ Equipped with a latch lock mechanism to maintain valve closure ■ Offers various materials for the gate's O-ring, including fluororubber, KALREZ, and Chemraz *KITZ SCT provides various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
Many products with high maintenance, high durability, and high sealing properties are available. Custom orders are accepted according to port diameter and application. All products are RoHS compliant.
We handle the "Vacuum Gate Valve" manufactured by VRC, which exhibits high sealing performance in both pressurization and depressurization. Our lineup includes distinctive products such as the "Bonnet Style" that complies with various flange standards (ISO, JIS, ANSI, etc.), the cost-effective and low outgassing "Aluminum Type," and types that are easy to maintain. We boast extremely low leak rates and are compliant with the RoHS directive. 【Product Lineup (Excerpt)】 ■ Bonnet Style Gate Valves (Aluminum and Stainless Steel) ■ End Operated Type Gate Valves ■ Small Stainless Steel Gate Valves ■ Rectangular Port Gate Valves ★ You can view the comprehensive catalog from the "PDF Download."
Active in the manufacturing processes of semiconductors and FPDs! A lineup that meets diverse needs is featured.
Our company is engaged in the design and manufacture of "ultra-high and high vacuum valves" used in the production of semiconductors and FPDs. We are currently offering a "comprehensive catalog" that includes various products. We feature a lineup that meets customer demands, including the "True L-Motion Gate Valve" designed for miniaturized semiconductor processes, the "Gate Valve T-Motion" for larger FPD substrates, and the "APC Penduroll Valve" capable of pressure control with low gas flow rates. [Contents Included] ◎ Information on ultra-high and high vacuum valves ◎ Transport gate valves ◎ Exhaust system gate valves ◎ Options *For more details, please refer to the materials. Feel free to contact us with any inquiries.
VATLOCK system vacuum gate valve
Valves for research and development and low vacuum applications in industry - Gate valve with VATLOCK system that securely seals even in back pressure situations with mechanical locking - Structure that does not burden the pump due to low vibration thanks to air damping - Easy to remove and maintain - Low cost